Zone-plate-array Lithography (zpal)

Nanolithography is the key technology driving technological progress in electronics, photonics, information technology and biotechnology. The tools and techniques used in the semiconductor industry have become too expensive for applications other than high-volume manufacturing. Masks, which are required for each unique design, can cost tens of thousands of dollars per layer. This economic constraint has made nano-patterning accessible to a select few, namely the major companies of the semiconductor industry, who can absorb these costs with high-volume production. Empowering the next generation of innovators will require making available an inexpensive, yet highly capable optical nanolithography tool.